Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11443969 | Automated substrate holder loading device | Rüdiger Pretscher | 2022-09-13 |
| 10832929 | Wafer-like substrate processing method and apparatus | Ralph Rauenbusch, Tobias Bussenius, Ray Weinhold | 2020-11-10 |