Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5851293 | Flow-stabilized wet scrubber system for treatment of process gases from semiconductor manufacturing operations | Scott Lane, Dinesh O. Shah, Liam R. Heading, Eric Simpson | 1998-12-22 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5851293 | Flow-stabilized wet scrubber system for treatment of process gases from semiconductor manufacturing operations | Scott Lane, Dinesh O. Shah, Liam R. Heading, Eric Simpson | 1998-12-22 |