Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5306530 | Method for producing high quality thin layer films on substrates | Mark W. Ruckman, Daniel R. Strongin | 1994-04-26 |
| 5282903 | High quality oxide films on substrates | Mark W. Ruckman, Yong L. Gao | 1994-02-01 |
| 5264394 | Method for producing high quality oxide films on substrates | Mark W. Ruckman, Yong L. Gao | 1993-11-23 |
| 4237151 | Thermal decomposition of silane to form hydrogenated amorphous Si film | Arup K. Ghosh, Harold Wiesmann, Edward B. Rock, Harry A. Lutz, III | 1980-12-02 |