Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12381464 | Magnet assembly, coil assembly, planar motor, positioning device and lithographic apparatus | Roger Franciscus Mattheus Maria Hamelinck, Jeroen Van Duivenbode | 2025-08-05 |
| 11243477 | Lithographic apparatus, an operating method and device manufacturing method | — | 2022-02-08 |
| 7983138 | Surface spacing using rigid spacers | Mark David Bedillion, Patrick Breckow Chu, Narayanan Ramakrishnan, James Dillon Kiely | 2011-07-19 |