Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7560196 | Mask for exposing an alignment mark, and method and computer program for designing the mask | — | 2009-07-14 |
| 6876092 | Substrate provided with an alignment mark, method of designing a mask, computer program, mask for exposing said mark, device manufacturing method, and device manufactured thereby | — | 2005-04-05 |