Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11803119 | Contaminant detection metrology system, lithographic apparatus, and methods thereof | Michal Emanuel Pawlowski, Aage Bendiksen, Han-Kwang Nienhuys | 2023-10-31 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11803119 | Contaminant detection metrology system, lithographic apparatus, and methods thereof | Michal Emanuel Pawlowski, Aage Bendiksen, Han-Kwang Nienhuys | 2023-10-31 |