Issued Patents All Time
Showing 26–28 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6538720 | Lithographic tool with dual isolation system and method for configuring the same | Daniel N. Galburt | 2003-03-25 |
| 4778332 | Wafer flip apparatus | William Byers | 1988-10-18 |
| 4750857 | Wafer cassette transfer mechanism | — | 1988-06-14 |