Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10822698 | Substrate processing apparatus, recording medium, and method of processing substrates | — | 2020-11-03 |
| 8666551 | Semiconductor-processing apparatus equipped with robot diagnostic module | Masahiro Takizawa | 2014-03-04 |
| 7832353 | Semiconductor manufacturing apparatus equipped with wafer inspection device and inspection techniques | Masahiro Takizawa | 2010-11-16 |