Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10010987 | Method of mounting substrate support in chamber, method of dismounting substrate support and auxiliary transport tool | Miho Majima | 2018-07-03 |
| 7638443 | Method of forming ultra-thin SiN film by plasma CVD | Rei Tanaka | 2009-12-29 |