Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12077857 | Temperature control assembly for substrate processing apparatus and method of using same | Heechul Jung, YonJong Jeon | 2024-09-03 |
| 11746414 | Temperature control assembly for substrate processing apparatus and method of using same | Heechul Jung, YonJong Jeon | 2023-09-05 |
| 11390945 | Temperature control assembly for substrate processing apparatus and method of using same | Heechul Jung, YonJong Jeon | 2022-07-19 |
| D922229 | Device for controlling a temperature of a gas supply unit | Heechul Jung, YonJong Jeon | 2021-06-15 |