Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10620648 | Substrate processing apparatus | Tsutomu Makino | 2020-04-14 |
| 10521774 | Preventive maintenance system and preventive maintenance method | Hanako Komine | 2019-12-31 |
| 10345832 | Insulation system and substrate processing apparatus | Tsutomu Makino | 2019-07-09 |