Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12051567 | Gas supply unit and substrate processing apparatus including gas supply unit | — | 2024-07-30 |
| D799646 | Heater block | — | 2017-10-10 |
| 8845806 | Shower plate having different aperture dimensions and/or distributions | Tomoyuki Baba | 2014-09-30 |