Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12412762 | Semiconductor substrate processing apparatus with a temperature sensor to measure the temperature of a bearing | Wiebren Harm Damsma, Erik ter Vrugt | 2025-09-09 |
| 11769682 | Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith | Adriaan Garssen | 2023-09-26 |
| 11139191 | Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith | Adriaan Garssen | 2021-10-05 |