Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7553516 | System and method of reducing particle contamination of semiconductor substrates | Louis Selen, Gerrit ten Bolscher | 2009-06-30 |
| 6974781 | Reactor precoating for reduced stress and uniform CVD | Maarten J. Teepen, Raffaele Mucciato, Rudi Wilhelm | 2005-12-13 |