Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8323737 | Sequential chemical vapor deposition | — | 2012-12-04 |
| 8144585 | Data processing device interface and methods thereof | Jonathan Owen | 2012-03-27 |
| 7682657 | Sequential chemical vapor deposition | — | 2010-03-23 |
| 7410671 | Sequential chemical vapor deposition | — | 2008-08-12 |
| 7399357 | Atomic layer deposition using multilayers | — | 2008-07-15 |
| 6652924 | Sequential chemical vapor deposition | — | 2003-11-25 |
| 6616986 | Sequential chemical vapor deposition | — | 2003-09-09 |
| 6342277 | Sequential chemical vapor deposition | — | 2002-01-29 |
| 6141203 | Electrostatic chuck | — | 2000-10-31 |
| 5916365 | Sequential chemical vapor deposition | — | 1999-06-29 |
| 5867359 | Electrostatic chuck | — | 1999-02-02 |
| 5535090 | Electrostatic chuck | — | 1996-07-09 |
| 5426558 | Anti-stick electrostatic chuck for a low pressure environment | — | 1995-06-20 |
| 4563367 | Apparatus and method for high rate deposition and etching | — | 1986-01-07 |