Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6410888 | Process chamber cooling | — | 2002-06-25 |
| 6259062 | Process chamber cooling | — | 2001-07-10 |
| 5589231 | Halogen-activated chemical vapor deposition of diamond | Robert H. Hauge | 1996-12-31 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6410888 | Process chamber cooling | — | 2002-06-25 |
| 6259062 | Process chamber cooling | — | 2001-07-10 |
| 5589231 | Halogen-activated chemical vapor deposition of diamond | Robert H. Hauge | 1996-12-31 |