Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7686022 | Nozzle device, and cleaning apparatus equipped with the nozzle device | Keiji Miyachi | 2010-03-30 |
| 6913027 | Resist stripping method and apparatus | Masahiko Amari | 2005-07-05 |
| 6553792 | Resist stripping method and apparatus | Masahiko Amari | 2003-04-29 |