Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8967608 | Glass substrate-holding tool and method for producing an EUV mask blank by employing the same | Takeru Kinoshita, Hirotoshi Ise | 2015-03-03 |
| 8837108 | Glass substrate-holding tool and method for producing an EUV mask blank by employing the same | Hirotoshi Ise, Takeru Kinoshita | 2014-09-16 |
| 8590342 | Method for producing TiO2-SiO2 glass body, method for heat-treating TiO2-SiO2 glass body, TiO2-SiO2 glass body, and optical base for EUVL | Akio Koike, Yasutomi Iwahashi, Tomonori Ogawa | 2013-11-26 |
| 8356494 | Process for producing porous quartz glass object, and optical member for EUV lithography | Yasutomi Iwahashi, Akio Koike | 2013-01-22 |