Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7037380 | Method for cleaning chamber of deposition apparatus for organic EL device production | Nobuya Hayashi, Hidekazu Okamoto, Masaaki Tsuzaki | 2006-05-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7037380 | Method for cleaning chamber of deposition apparatus for organic EL device production | Nobuya Hayashi, Hidekazu Okamoto, Masaaki Tsuzaki | 2006-05-02 |