Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5179049 | Heat treating apparatuses for semiconductors and high purity silicon carbide parts for the apparatuses and a method of making thereof | Hideji Numata, Takuro Ono, Nobuo Kageyama, Koji Furukawa | 1993-01-12 |