Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9081193 | Interferometric systems and methods | Thomas D. Milster, Thiago Jota | 2015-07-14 |
| 8472111 | Apparatus and method for deep ultraviolet optical microscopy | Thomas D. Milster | 2013-06-25 |
| 7916291 | Apparatus and method for spectroscopy | Thomas D. Milster, Pramod K. Khulbe | 2011-03-29 |
| 7218596 | Apparatus and method for optical data storage and retrieval | — | 2007-05-15 |
| 7003215 | Vapor flow controller | James Matthews | 2006-02-21 |
| 6605815 | Method of lithography using vacuum ultraviolet radiation | — | 2003-08-12 |
| 6509194 | Method and apparatus for determining concentration of NH-containing species | — | 2003-01-21 |
| 6369398 | Method of lithography using vacuum ultraviolet radiation | — | 2002-04-09 |
| 4479927 | Regenerable cold trap for aluminum chloride effluent | — | 1984-10-30 |
| 4415402 | End-point detection in plasma etching or phosphosilicate glass | C.C. Wang | 1983-11-15 |
| 4383431 | Auto-zero system for pressure transducers | — | 1983-05-17 |