Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7270240 | Device for accomodating substrates | Matthias Niese, Jorg Franzke | 2007-09-18 |
| 7067017 | Method and system for cleaning semiconductor elements | Christiane Gottschalk, Ulrich Brammer | 2006-06-27 |
| 6786976 | Method and system for cleaning semiconductor elements | Christiane Gottschalk, Ulrich Brammer | 2004-09-07 |
| 5569437 | Ozone generating apparatus | Hans-Henrich Stiehl, Herbert Bestandig | 1996-10-29 |
| 5364600 | Apparatus for producing ozone from oxygen | Hans-Henrich Stiehl | 1994-11-15 |