Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7582183 | Apparatus for detection of thin films during chemical/mechanical polishing planarization | — | 2009-09-01 |
| 7569119 | In-situ real-time monitoring technique and apparatus for detection of thin films during chemical/mechanical polishing planarization | — | 2009-08-04 |
| 7037403 | In-situ real-time monitoring technique and apparatus for detection of thin films during chemical/mechanical polishing planarization | — | 2006-05-02 |
| 7024063 | In-situ real-time monitoring technique and apparatus for endpoint detection of thin films during chemical/mechanical polishing planarization | — | 2006-04-04 |
| 6849152 | In-situ real-time monitoring technique and apparatus for endpoint detection of thin films during chemical/mechanical polishing planarization | — | 2005-02-01 |
| 6614529 | In-situ real-time monitoring technique and apparatus for endpoint detection of thin films during chemical/mechanical polishing planarization | — | 2003-09-02 |
| 5949927 | In-situ real-time monitoring technique and apparatus for endpoint detection of thin films during chemical/mechanical polishing planarization | — | 1999-09-07 |