Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12199091 | Shallow trench isolation processing with local oxidation of silicon | Robert M. Higgins, Xiaoju Wu, Li Wang | 2025-01-14 |
| 6817640 | Four-bar linkage wafer clamping mechanism | Damon K. Cox | 2004-11-16 |
| 6682113 | Wafer clamping mechanism | Damon K. Cox | 2004-01-27 |
| 5555902 | Submicron particle removal using liquid nitrogen | — | 1996-09-17 |
| 5456758 | Submicron particle removal using liquid nitrogen | — | 1995-10-10 |
| 5061068 | Process for detection of sub-micron particulate contamination on a bare (planar) substrate | — | 1991-10-29 |
| 4920083 | Novel process for the production of ceramic flakes | — | 1990-04-24 |