TA

Terukazu Aitani

Applied Materials: 2 patents #3,641 of 7,310Top 50%
Overall (All Time): #2,223,388 of 4,157,543Top 55%
2
Patents All Time

Issued Patents All Time

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
6192898 Method and apparatus for cleaning a chamber Takaaki Yamamoto 2001-02-27
5902403 Method and apparatus for cleaning a chamber Takaaki Yamamoto 1999-05-11