Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6277763 | Plasma processing of tungsten using a gas mixture comprising a fluorinated gas and oxygen | Katsuhisa Kugimiya, Daisuke Tajima | 2001-08-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6277763 | Plasma processing of tungsten using a gas mixture comprising a fluorinated gas and oxygen | Katsuhisa Kugimiya, Daisuke Tajima | 2001-08-21 |