Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7630858 | Tool health information monitoring and tool performance analysis in semiconductor processing | Susan Weiher-Telford | 2009-12-08 |
| 7454312 | Tool health information monitoring and tool performance analysis in semiconductor processing | Susan Weiher | 2008-11-18 |