Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11808989 | Method for producing a microoptoelectromechanical component, and corresponding microoptoelectromechanical component | — | 2023-11-07 |
| 8124502 | Semiconductor device manufacturing method, semiconductor device and semiconductor device manufacturing installation | — | 2012-02-28 |