Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5863839 | Silicon and polycide plasma etch appplications by use of silicon-containing compounds | Dale A. Olson, Xue-Yu Qian | 1999-01-26 |
| 5705433 | Etching silicon-containing materials by use of silicon-containing compounds | Dale A. Olson, Xue-Yu Qian | 1998-01-06 |
| 5354417 | Etching MoSi.sub.2 using SF.sub.6, HBr and O.sub.2 | Ernest Cheung | 1994-10-11 |