Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5877090 | Selective plasma etching of silicon nitride in presence of silicon or silicon oxides using mixture of NH.sub.3 or SF.sub.6 and HBR and N.sub.2 | Terry Kin Ting Ko | 1999-03-02 |