Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7329328 | Method for etch processing with end point detection thereof | Aaron D. Gustafson, Daniel Baer, Leonard D. Moravek | 2008-02-12 |
| 6837965 | Method and apparatus for etch processing with end point detection thereof | Aaron D. Gustafson, Daniel Baer, Leonard D. Moravek | 2005-01-04 |