Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12227847 | Level monitoring and active adjustment of a substrate support assembly | Patricia M. Liu | 2025-02-18 |
| 6716287 | Processing chamber with flow-restricting ring | Damian W. Sower | 2004-04-06 |