Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12394606 | Impedance control of local areas of a substrate during plasma deposition thereon in a large PECVD chamber | Zheng John Ye, Andrew Lam, Zeqiong Zhao, Jianhua Zhou, Hshiang AN +2 more | 2025-08-19 |