Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8658522 | Methods and apparatus for incorporating nitrogen in oxide films | Tatsuya Sato, Patricia M. Liu | 2014-02-25 |
| 8375892 | Methods and apparatus for incorporating nitrogen in oxide films | Tatsuya Sato, Patricia M. Liu | 2013-02-19 |
| 7913645 | Methods and apparatus for incorporating nitrogen in oxide films | Tatsuya Sato, Patricia M. Liu | 2011-03-29 |
| 7902050 | Methods and apparatus for incorporating nitrogen in oxide films | Tatsuya Sato, Patricia M. Liu | 2011-03-08 |