Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6845294 | Method for providing distributed material management and flow control in an integrated circuit factory | Raja Sunkara | 2005-01-18 |
| 6725114 | Method and apparatus for automatically generating schedules for wafer processing within a multichamber semiconductor wafer processing tool | — | 2004-04-20 |
| 6684123 | Method and apparatus for accessing a multiple chamber semiconductor wafer processing system | Raja Sunkara | 2004-01-27 |
| 6580967 | Method for providing distributed material management and flow control in an integrated circuit factory | Raja Sunkara | 2003-06-17 |
| 6519498 | Method and apparatus for managing scheduling in a multiple cluster tool | Mark T. Pool, Raja Sunkara | 2003-02-11 |
| 6496746 | Method and apparatus for automatically generating schedules for wafer processing within a multichamber semiconductor wafer processing tool | — | 2002-12-17 |
| 6336204 | Method and apparatus for handling deadlocks in multiple chamber cluster tools | — | 2002-01-01 |
| 6224638 | Method and apparatus for scheduling wafer processing within a multiple chamber semiconductor wafer processing tool having a multiple blade robot | Srilakshmi Venkatesh | 2001-05-01 |
| 6201999 | Method and apparatus for automatically generating schedules for wafer processing within a multichamber semiconductor wafer processing tool | — | 2001-03-13 |
| 6074443 | Method and apparatus for scheduling wafer processing within a multiple chamber semiconductor wafer processing tool having a multiple blade robot | Srilakshmi Venkatesh | 2000-06-13 |
| 5928389 | Method and apparatus for priority based scheduling of wafer processing within a multiple chamber semiconductor wafer processing tool | — | 1999-07-27 |