Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10115572 | Methods for in-situ chamber clean in plasma etching processing chamber | Banqiu Wu, Xiaoyi Chen | 2018-10-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10115572 | Methods for in-situ chamber clean in plasma etching processing chamber | Banqiu Wu, Xiaoyi Chen | 2018-10-30 |