Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6066366 | Method for depositing uniform tungsten layers by CVD | Daniel Berenbaum, Herald Hauf, Richard Petri, Jean-Christopher Favreau | 2000-05-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6066366 | Method for depositing uniform tungsten layers by CVD | Daniel Berenbaum, Herald Hauf, Richard Petri, Jean-Christopher Favreau | 2000-05-23 |