Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12319519 | Carrier transport system, vacuum processing apparatus, and method of transportation of a carrier in a vacuum chamber | — | 2025-06-03 |
| 11139759 | Apparatus for at least one of holding, positioning and moving an object and method of operating an apparatus for at least one of holding, positioning and moving an object | Britta Späh, Martin Aenis, Timo ADLER | 2021-10-05 |