Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7602960 | System and method for measuring thin film thickness variations and for compensating for the variations | — | 2009-10-13 |
| 7315642 | System and method for measuring thin film thickness variations and for compensating for the variations | — | 2008-01-01 |
| 7243331 | Method and system for controlling the quality of a reticle | — | 2007-07-10 |