Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D1051081 | Exhaust wall liner for semiconductor manufacturing apparatus | Chang Min Kwon | 2024-11-12 |
| D1034493 | Chamber wall liner for a semiconductor manufacturing apparatus | Chang Min Kwon | 2024-07-09 |
| 11967492 | Thin film manufacturing apparatus | Byoung Il Lee, Chang Min Kwon, Seung Won Yu | 2024-04-23 |
| 11450551 | Edge ring and heat treatment apparatus having the same | Chang Min Kwon | 2022-09-20 |
| 11136670 | Gas spraying apparatus, substrate processing facility including the same, and method for processing substrate using substrate processing facility | Sang Hyun JI | 2021-10-05 |
| 9431279 | Heater block and a substrate treatment apparatus | Sung-Chul Kim, Chang Min Kwon, Ki-Nam Kim | 2016-08-30 |
| 8913884 | Heater block for a rapid thermal processing apparatus | Tae Jong Ki, Choul KIM, Ki-Nam Kim | 2014-12-16 |
| 4281841 | O-Ring sealing arrangements for ultra-high vacuum systems | Robert Flaherty | 1981-08-04 |