Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7886808 | Heating and cooling apparatus, and vacuum processing apparatus equipped with this apparatus | Kazuhito Watanabe, Nobuyuki Takahashi | 2011-02-15 |
| 7182122 | Heating and cooling apparatus, and vacuum processing apparatus equipped with this apparatus | Kazuhito Watanabe, Nobuyuki Takahashi | 2007-02-27 |
| 6432261 | Plasma etching system | Kazuhito Watanabe, Hironari Shimizu, Nobuyuki Takahashi | 2002-08-13 |