Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5047130 | Method and apparatus for magnetron discharge type sputtering | Yasuhiko Akao | 1991-09-10 |
| 4405436 | Sputtering apparatus | Haruhiro Kobayashi, Hidefumi Funaki | 1983-09-20 |