Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6063236 | Vacuum processing system and method of removing film deposited on inner face of vacuum vessel in the vacuum processing system | — | 2000-05-16 |
| 5855725 | Vacuum processing system and method of removing film deposited on inner face of vacuum vessel in the vacuum processing system | — | 1999-01-05 |