Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5120417 | Magnetron sputtering apparatus and thin film depositing method | Nobuyuki Takahashi, Hideaki Yoshida, Yasuhiko Akao | 1992-06-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5120417 | Magnetron sputtering apparatus and thin film depositing method | Nobuyuki Takahashi, Hideaki Yoshida, Yasuhiko Akao | 1992-06-09 |