Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8168049 | Sputtering apparatus and method of manufacturing solar battery and image display device by using the same | — | 2012-05-01 |
| 5833815 | Sputter deposition system | Kyung-Shik Kim, Tamio Yamada, Yoshifumi Unehara | 1998-11-10 |