Ji H. Rhieu

AS Amtech Systems: 3 patents #22 of 36Top 65%

Overall (All Time): #1,630,809 of 4,157,543Top 40%

Patents All Time

Issued Patents All Time

Patent #	Title	Co-Inventors	Date
6143477	Dual wavelength UV lamp reactor and method for cleaning/ashing semiconductor wafers	—	2000-11-07
5364667	Photo-assisted chemical vapor deposition method	—	1994-11-15
5215588	Photo-CVD system	—	1993-06-01