Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6565304 | Wafer boat elevator system and method | John M. Martin, Allen D. Edwards | 2003-05-20 |
| 6537010 | Wafer boat support and method for twin tower wafer boat loader | John M. Martin, Allen D. Edwards | 2003-03-25 |
| 6352399 | Twin tower wafer boat loading system and method | John M. Martin | 2002-03-05 |
| 5888048 | Automatic wafer boat loading | John M. Martin | 1999-03-30 |
| 5765982 | Automatic wafer boat loading system and method | John M. Martin | 1998-06-16 |