Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8798778 | Method and system for synchronizing chamber down times by controlling transport sequencing in a process tool | — | 2014-08-05 |
| 8504186 | Method for automatic generation of throughput models for semiconductor tools | Roy Boerner, Jan Lange | 2013-08-06 |
| 8170704 | Method and system for automatic generation of throughput models for semiconductor tools | Roy Boerner, Jan Lange | 2012-05-01 |
| 8126588 | Method and system for controlling transport sequencing in a process tool by a look-ahead mode | Matthias Becker | 2012-02-28 |
| 7571020 | Method and system for controlling process tools by interrupting process jobs depending on job priority | — | 2009-08-04 |
| 7567851 | Method and system for dynamically changing the transport sequencing in a cluster tool | — | 2009-07-28 |
| 7487002 | Method and system for determining utilization of process tools in a manufacturing environment based on characteristics of an automated material handling system | — | 2009-02-03 |