Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5248635 | Method of fabricating and passivating semiconductor devices | Wolfgang Kuebart, Joachim Scherb | 1993-09-28 |
| 5136977 | Apparatus for depositing dielectric films | Wolfgang Kuebart, Joachim Scherb, Alfred Schonhofen | 1992-08-11 |