Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6315879 | Modular deposition system having batch processing and serial thin film deposition | Hudson Washburn | 2001-11-13 |
| 6139695 | Modular deposition system having batch processing and serial thin film deposition | Hudson Washburn | 2000-10-31 |
| 5705044 | Modular sputtering machine having batch processing and serial thin film sputtering | Hudson Washburn | 1998-01-06 |